Hydrogen profile measurement of (Pb,La)(Zr,Ti)O3 capacitor with conductive electrode after hydrogen annealing

We fabricated ferroelectric (Pb,La)(Zr,Ti)O
₃
(PLZT) capacitors with Pt, Al:ZnO, or Sn:In
₂
O
₃
top electrodes. The remnant polarization decreased for these PLZT capacitors after forming gas (3%H
₂
/balance N
₂
) annealing at 200°C and 1 Torr, especially for PLZT capacitor with Pt top electrodes due to the catalytic effect of Pt. The time-of-flight secondary ion mass spectrometry depth profile showed that the hydrogen content in PLZT thin films with Pt top electrode increased ca. 2.7 times after forming gas annealing compared with ca. 1.2 times with other electrodes.