Electrical Levitation For Micromotors And Microaccelerometers

Electrical levitation is an excellent candidate method as a solution to the problem of surface contact friction resulting from the instability of rotors in micromotors. One of the most important aspects of electrical levitation is the achievement of stable equilibrium suspension. The theories and experiments in previous works are not enough to conduct the practical application of electrical levitation in MEMS. In this paper, the developed stable conditions of electrical levitation using three independent resonant circuits are presented, and the experimental procedure related to it is described. At last, the application of electrical levitation in micromotors, electrostatic microgyroscopes and microaccelerometers is examined.