Surface-micromachined Movable SOI Optical Waveguides

We demonstrate the fabrication and the micromechanical motion of a new type of optical waveguides, the surface-micromachined movable SOI optical waveguides. The movable waveguides are either in form of cantilevers and bridges. The fabrication process is based on conventional IC technology. Deflection amplitude of 1400/spl mu/m for cantilevers guiding lightwave of 1.3/spl mu/m wavelength is observed. Waveguide loss of less than 1.8dB/cm with a 10% polarization dependence is achieved.