Screen-printed free-standing piezoelectric devices using low temperature process

This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers and encastre beam structures have been fabricated simultaneously on a single substrate, demonstrating the feasibility of mass production.