Formation of FePt nanoparticle arrays using nanohole templates

This study investigates the synthesis and characterization of FePt nanodot arrays. The FePt nanometer-scale thin film is deposited on SiO
_x
substrate by RF sputtering and heat treated by rapid thermal annealing at 650°C for 20 min. Scanning electron microscopy, X-ray diffraction, and alternating gradient force microscopy are employed to determine the structural and magnetic hysteresis properties of the nanodots.