SOI Slotted Photonic Crystal Cavities Spanning From 1.3 to $1.6~\mu \text{m}$ With $Q/V$ Factors Above 800 000

A series of slot Si-on-SiO
₂
photonic crystal heterostructure cavities with resonant wavelengths ranging from 1.28 to 1.6 μm is reported. These cavities, presenting Q/V factors typically around 800000, can be used for the hybrid integration of various active materials within the silicon photonics platform.