Effect of conductor thickness on on-chip 3-D inductor for RF applications

On-chip inductors are characterized based on Quality factor, Inductance and Self resonant frequency values. These values depend on dimensions of the conductor. Quality factor of an inductor is highly dependent on conductor thickness, as conductor thickness increases Q value increases. In this paper simulation is carried out for inductor by varying conductor thickness to 0.5μm, 1μm, 2μm. The frequency response of this inductor by varying conductor thickness is observed from frequency range 10-100GHz, suitable for RF/Microwave applications. Simulation of proposed inductor is carried out in IE3D EM field solver to obtain quality factor and inductance values. Proposed inductor has area of cross-section 10×10μm
²
on silicon chip.