Line defect detection on 2D materials with micro four-point probe measurement

This paper presents a measurement scheme which can be used to detect the line defects in two dimensional (2D) materials such as graphene. With micro four point probe measurement, the sheet resistances of the material can be mapped in two directions. Therefore, the line defects with insulation boundaries can be illustrated by calculating the resistance ratio R
_A
/R
_B
. We have demonstrated the simulations on 2D material with single defect and double defects with different positions and angles. The size effect of the defects has also been studied. The presented method is also promising for material characterization and defect estimation on film materials.