Surface-grating Bragg reflector lasers using deeply etched groove formed by reactive beam etching

Surface-grating InGaAlAs MQW distributed Bragg reflector (DBR) lasers were fabricated in a single-growth step. Deep-grating grooves in the 1.15-/spl mu/m thick clad layer were formed by Br/sub 2/-N/sub 2/ reactive beam etching. The reflectivity and the coupling coefficient of a 35-/spl mu/m-long DBR mirror provided by XOO-nm-deep grooves were evaluated to be about 0.3 and 230 cm/sup -1/-400 cm/sup -1/. Between 15 and 55/spl deg/C, the measured temperature dependence of the lasing wavelength is about 0.1 nm//spl deg/C which is one-fifth the dependence of a Fabry-Perot type laser.