A 0.18μm SOI BCD technology for automotive application

This paper presents a new SOI BCD technology at the 0.18μm node to fulfill the requirements for smart power IC technology targeted for automotive application. Built on a 1.8V and 5.0V CMOS core, there are 40V and 60V rated N/Pch MOS, with 25mΩ.mm
²
RonA/57V BVdss having been achieved for the 40V NMOS with excellent process stability. Depletion NMOS, LV&HV diodes, 5V zener diode, high gain BJT, excellent matching well resistor, capacitors, top thick Copper Metallization option, embedded memory (OTP, CEEPROM, etc.) are also offered on this comprehensive technology platform.