A breakthrough concept of HVICs for high negative surge immunity

A new technology concept of HVICs which realizes high negative surge immunity has been proposed for junction-isolation (JI) or self-isolation (SI) processes. The basic concept is to isolate a substrate from the ground level to block the surge current. A new 1200V-class HVIC based on the new concept has been fabricated. The new HVIC has shown more than 10x higher negative surge immunity.