Shear mode piezoelectric microactuator for magnetic disk drives

We developed a new piezoelectric microactuator for dual-stage actuator systems in magnetic disk drives. This actuator exploits the shear mode of piezoelectric elements and drives the head suspension assembly. This paper describes the structure of our piezoelectric actuator, its mechanical characteristics, and the experimental results of a life test after driving the piezoelectric elements in an atmosphere of high temperature and humidity.