Texture and magnetic properties of FeTaN films bias-sputtered on sloping surfaces

The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N/sub 2//Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both [110] fiber texture along the film normal and uniform distribution of [002] axes in the film plane. Increased bombardment of Ar ions also results in reduced [110] lattice spacing. An increased [110] peak intensity is similarly observed when the N/sub 2//Ar flow ratio is decreased.