Chip-scale electrodynamic synthetic jet actuators

We report a chip-scale electrodynamic synthetic jet actuator that integrates both a coil and a wax-bonded NdFeB permanent magnet using standard silicon micromachining processes. A copper micro-coil and a poly-dimethyl-siloxane (PDMS) diaphragm with the magnet are fabricated onto two different dies. An orifice, through which the jet is synthesized, is laser cut on the coil die. The dies are then assembled together to create a device with the dimensions 7.5 mm × 7.5 mm × 1 mm. Operating at 180 Hz and 20 mW input power, the device generates a fluidic jet with a peak velocity of 2.1 m/s.