Multi roof tile-shaped vibration modes in mems cantilever sensors for liquid monitoring purposes

We realized piezoelectrically self-actuated self-sensing cantilever sensors for liquid monitoring purposes excited in higher orders of the roof tile-shaped mode. This advanced class of vibration mode supports very high Q-factors in liquid media and high volume strain values which result in combination with an optimized electrode design in enhanced strain related conductance peaks. Therefore, precise fluid property measurements even for highly viscous liquids like D500 (~ 430 cP) are feasible.