Design, simulation and fabrication of MEMS Lorentz force sensor

This work deals with the MEMS electronic compass (e-compass) with the novel electrical signal decouple mechanism. The proposed e-compass includes of a resonant Lorentz-force magnetic sensor and a capacitive accelerometer. The accelerometer and magnetic sensor use the same mechanical structure to detect the acceleration and magnetic field. The corresponding readout circuits are designed and implemented by the standard 0.25um CMOS process. An equivalently diode-capacitor MEMS mechanical structure is proposed to suppress unexpected electrical AC and DC coupling. The prototype of the proposed sensor is with resonant frequency about 19.428 kHz and mechanical quality factor about 500. The preliminary results show that the output sensitivity is about 128 mV/Gauss and the corresponding R2-linearity is 0.9982 under current 2.39mA.