Abstract:
A family of novel wafer-level-system-integration technologies (WLSI) was proposed. This paper reviews WLSI feasibility work first. Further results on the reliability, the...Show MoreMetadata
Abstract:
A family of novel wafer-level-system-integration technologies (WLSI) was proposed. This paper reviews WLSI feasibility work first. Further results on the reliability, the compatibility of the integration with both more advanced node Logic and DRAM devices, and the higher-level system integration of the WLSI technologies are then presented. Foundry has established a comprehensive system integration technology portfolio in wafer form to fulfill the needs from mobile to cloud computing for the future growth of the Si-based nano-electronics industry.
Published in: 2014 IEEE International Electron Devices Meeting
Date of Conference: 15-17 December 2014
Date Added to IEEE Xplore: 23 February 2015
Electronic ISBN:978-1-4799-8001-7
Contents 