High performance polysilicon nanowire NEMS for CMOS embedded nanosensors

We present for the first time sub-100nm poly-Silicon nanowire (poly-Si NW) based NEMS resonators for low cost cointegrated mass sensors on CMOS featuring excellent performance when compared to crystalline silicon. In particular, comparable quality factors (130 in the air, 3900 in vacuum) and frequency stabilities are demonstrated. The minimum measured Allan deviation of 7×10
^-7
leads to a mass resolution detection down to 100 zg (100×10
^-21
g). Moreover a novel method for in-line NW gauges factor (GF) extraction is proposed and used.