Extraction of high-frequency equivalent circuit parameters of submicron gate-length MOSFET's

As the effective gate-length of a MOSFET reduces, its high-frequency characteristics improve. However, they become more difficult to model. Current SPICE models are based on DC measurement data and simplistic capacitance models which can only approximate the high-frequency device characteristics up to a fraction of the device unity current gain frequency (f/sub /spl tau//). Thus, it is important to investigate the high-frequency characteristics and then incorporate the small-signal equivalent circuit parameters in SPICE. In this, work we report a simple nonquasi static model, which offers good accuracy needed for circuit simulation, and a new curve fitting method for the extraction of the network model elements. The current work is part of a study aimed at improving the existing scalable model for MOSFET's, and it focuses on extracting the elements of an equivalent circuit which describes the state-of-the-art device.