A novel ASIC interface for gas flow sensor

Electronic gas flow meters are expected to replace the current mechanical devices. One of the promising solutions is based on thermal MEMS sensor. In this paper, a novel system is introduced that combines a MEMS gas flow sensor and its interface circuit. A 15 bits ASIC is implemented to interface the sensor to an external processor through a standard serial communication. The CMOS 0.13 micrometer ASIC consumes total power of 2.67mW when operating in the continuous read mode. On-demand read mode is supported to lower the power consumption. The total system SNR is 86dB.