Design and simulation of a 2-axis low g acceleration switch with multi-folded beams

A 2-axis low G acceleration threshold switch with multi-folded beams and buffering springs is presented in this paper. The multi-folded beams at four corners which anchored on the substrate permit the proof-mass move in both X and Y axis. The buffering springs contact the proof-mass and one electrode aiming at extending the contact time when the switch is latched while protecting the switch against severe shock damage from intensive impact of the switch. The threshold acceleration of the switch is designed as 60G and will be fabricated by a two-mask silicon-on-glass process.