Study of MEMS microcantilever based on their geometric parameters

A sensor type which is based on microcantilever beam configuration is very attractive for chemical sensing applications because of its effective sensitivity. Adsorption onto the surface of sensing element causes deflection, shifting its resonance frequency and changing its surface stress. This allows accurate measurement of adsorbed analytes in range of nanograms. This sensing method has been known to be highly sensitive, cheap, compact and robust. In this paper, the shift in resonant frequency, displacement and stress of the microcantilever for different geometric parameters has been studied.