Influence of the excitation frequency increase on a fluid model of the capacitively coupled argon plasma

In this work a simulation procedure for a plasma fluid model at very high excitation frequencies (VHF) is presented. The modeling of gas discharges based on the fluid model requires the input of collision cross-sections and electron energy distribution function (EEDF) which is obtained by solving the Boltzmann equations (BE). In this case the general discharge conditions must be known. For the higher excitation frequencies above 100 MHz the complex input parameter set for a BE solver is hard to obtain. Thus, a method of optimization of the modeling parameters for VHF range has been developed and is introduced in this work. Using a 1D plasma model for a capacitively coupled plasma reactor (CCP) the influence of the excitation frequency on the simulation procedure is presented. The results of performed calculations show the dependence of the EEDF and the computed transport properties like electron mobility, electron diffusivity, electron energy mobility, and electron energy diffusivity on the plasma excitation frequency.