Investigation of the morphology and elemental composition of the silicon-containing calcium phosphate coating treated by intensive pulsed electron beam

The surface of titanium substrate with calcium phosphate (CaP) coating prepared by RF magnetron sputtering was treated by a pulsed electron beam with an energy density of 0.8-8 J/cm
²
. A partial or complete intermixing of the surface layers of the system CaP-titanium was observed. Significant changes in the topography of the formed surfaces were revealed. Treatment conditions with an energy density of 0.8 and 3 J/cm
²
led to the thermal annealing of the coating. The use of beam parameters with an energy density of 6.5 and 8 J/cm
²
led to the partial vaporization and intermixing of the coating with a titanium matrix.