Novel high resolution MOEMS inclination sensor

Inclination sensors are essential elements in many different fields of application such as navigation, metrology, geodetics, geoscience, as well as in the consumer market. In general, for high precision navigation. The sensor's resolution is one of the key parameters to improve the performance and to open up new areas of applications. The implementation of a miniaturized optical readout is one of the most promising ways to accomplish this goal. This paper discusses the principle of a novel inclination sensor along with obtained measurements of two prototypes with different mechanical parameters. The achieved sensitivity is 0.044 V/° resulting in an angular resolution of 0.0051°.