Design, fabrication and characterization of a micro-machined gravity gradiometer suspension

This paper presents the design, fabrication and characterization of a suspension for rotational micromachined sensors with an ultra-low rotational spring stiffness but very high spurious-modes rejection ratios. This suspension is applied to a micro-machined gravity gradiometer for satellite gravity surveys, achieving a 3.38 Hz resonant frequency with the first spurious rejection ratio of 23.