Cantilever array sensor for multiple liver cancer biomarkers detection

A novel microcantilever biosensor was batch-fabricated with IC compatible MEMS technology for joint detection of liver cancer biomarkers with high sensitivity, high throughput, high specification, and good precision. A micro-cavity was designed in the free end of the cantilever for local antibody-immobilization using micro printing system, which can dramatically reduce the effect of adsorption-induced k variation. A linear relationship between the resonance frequency shift and the antigen concentration was observed for three liver cancer biomarkers, AFP, GGT-2, and HGF. In addition, the presented immunosensing method has little cross-reactivity to different antigen, paving the way to a highly specific technique. These approaches will promote clinical application of the cantilever sensors in cancer early diagnosis.