Preparation of soft magnetic Fe-N films by ion beam deposition method with strict control of plasma potental

Ion beam deposition (IBD) method is very attractive to deposit the ionized particles such as metal and reactive gas ions themselves on substrates with direct controllability of the kinetic energy and to form thin films of metallic nitride and boride. It is well known that Fe_x-N exhibits very different magnetic properties with its degree of nitridation. The crystallographic and magnetic characteristics of Fe -N films formed by using IBD system were investigated in detail, because it can strictly control the degree of nitridation and kinetic energy of depositing particles.