Influence of residual gas pressure and ion implantation on the properties of nitride high-entropy alloys (TiZrAlYNb)N

Using methods of electronic and atomic-force microscopy, energy-dispersive analysis, laser scanning microscopy, X-ray diffraction, hardness measurements the nitrides of high-entropy alloys (TiZrAlYNb)N, obtained by cathodic-vacuum-arc-vapor-deposition, were investigated. Influence of residual gas pressure on the properties of investigated nitrides was found. In addition, comparison of structure and phase analysis of investigated coatings before and after ion implantation of the heavy negative charged Au- was conducted.