Current state and prospects of development the micromachined electrovacuum devices in the short-range microwave

In this article prospects of creations of new miniature electro vacuum amplifiers and generators of the terahertz range on the basis of vacuum integrated schemes with a field emission cathodes are considered. Analogs of such devices are classical devices of vacuum electronics with average transit angle: monotrons, reflex klystrons, klystrons with the distributed interaction. The ways to further increase efficiency and power output of such devices were defined.