Integration of PZT thin films on a microfluidic complex system

We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O
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(PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 µl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.