MEMS-based silicon ultrasonic twin-nozzle nebulizer for inhalation drug delivery

A versatile silicon-based ultrasonic nebulizer that utilizes a twin-nozzle of multiple Fourier horns at 1-2 MHz drive frequencies has been realized to perform simultaneous aerosolization of cobinamide and magnesium thiosulfate drug solutions. The drive frequency of the individual nozzle for a desirable aerosol diameter was individually designed. Using the 2.0 MHz 4-Fourier horn twin-nozzle aerosols of the two drug solutions with mass median diameter (MMD) of 3.0±0.1μm and geometrical standard deviation (GSD) of 1.18±0.02 and total flow rate up to 400μL/min were produced.