X-ray irradiation test of a MEMS-based X-ray optic

MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm
²
both of which are 3 and 40 times better than those in the first test.