MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation

We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.