Imprinted DOE on varifocal membrane lens

We present a highly compact, fully integrated tunable lens for confocal hyperspectral imaging with imprinted diffractive structures on a polydimethylsiloxane (PDMS) membrane. The PDMS membrane was patterned by replication technique with a diffractive optical element (DOE) on quartz glass as master mold. The smallest feature size is 0.8μm the membrane thickness is 100 μm. The liquid-filled lens is hydraulically driven by integrated magnetic actuation and serves as a tunable filter in the spectral range of 450-900 nm with a linewidth less than 18 nm over the entire tuning range.