The thermal treatment effect on electrical properties of mn-modified polycrystalline BiFeO3 thin films

Mn modified BFO (BFMO) thin films has been deposited using pulsed laser deposition on Pt(111)/Ti/SiO
₂
/Si(100) substrates at 540°C. After completion of deposition, the BFMO thin films were cooled by two different procedures; quenching and chamber cooling. Differences in structural and electrical properties of BFMO thin films were investigated by an X-ray diffractometer and an electrical system, respectively. Improvement in ferroelectricity, a large remnant polarization of ~187.39 μC/cm
²
with 600 kV/cm, was found from the quenched BFMO film. This was attributed to the observed high texturing along (111) orientation. Reduced leakage current density of the quenched BFMO films were explained by defect chemistry with a possibly lower concentration of the oxygen vacancy due to quenching procedure.