Development and manufacture of electrostatic capacitive energy harvesting device

The design of MEMS electrostatic generator that converts the mechanical energy vibration into electrical energy is developed. The prototype of the generator has been implemented and tested. At vibration frequency of 67 Hz and external load resistance of 23.7 MΩ the output power of 175 W is achieved. The estimation of the maximum power density for one-capacitor and two-capacitor structures of MEMS generator is carried out.