300 mm evaluation activities in Selete

300 mm equipment and materials are being developed in order to start IC mass production with 300 mm wafers in the year 2000. Semiconductor Leading Edge Technologies (Selete) has been evaluating and improving these technologies to complete mass production-type equipment development. The 300 mm fabrication facility plan, equipment development plan and wafer production plan are shown. The evaluation status of some machines is described, along with the issues which must be improved.