Automated Micro Hall Effect measurements

With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) [1] based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance [2,3] as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method [4].