Thickness effects of ZnO thin films on flexible ozone sensors

ZnO nanoparticles thin films were deposited with different thicknesses on Kapton flexible substrates by drop coating method. The flexible platform consists in Ti/Pt interdigitated electrodes for gas detection and a heater device fabricated by Magnetron Sputtering and photolithography process. The thickness effects of the ZnO thin film on the gas sensing properties by ozone exposure at 200 °C has been studied. In order to test a deposit methodology used in large scale industrial production, an ultrasonic spray deposition was done. It was found that the sensitivity towards ozone gas is strongly dependent of the ZnO thin film thicknesses.