Selectively oxidized vertical-cavity laser performance and technology

We discuss revolutionary performance advances in selectively oxidized vertical-cavity surface emitting lasers (VCSELs), which have enabled low operating power laser diodes appropriate for aerospace applications. Incorporating buried oxide layers converted from AlGaAs layers within the laser cavity produces enhanced optical and electrical confinement enabling superior laser performance, such as high efficiency and modulation bandwidth. VCSELs are also shown to be viable over varied environmental conditions such as ambient temperature and ionized radiation. The development of novel VCSEL technologies for advanced system applications is also described. Two-dimensional individually addressable VCSEL arrays exhibit uniform threshold and operating characteristics. Bottom emitting 850 nm VCSEL arrays fabricated using wafer fusion are also reported.