Micromachined angular rate sensor allowing interchangeable operation in both amplitude modulation and frequency modulation

The paper reports a novel design of MEMS vibratory gyroscope. The gyroscope consists of multi-mass. The proposed angular sensor can be operated in both amplitude modulation (AM) and frequency modulation (FM). The proposed gyroscope can work as a 2-degree of freedom (DOF) gyroscope or a 3-DOF gyroscope. When the sensor works as a 2-DOF gyroscope, the simulation shows that the sensitivity is high and the bandwidth is narrow. When the sensor works as a 3-DOF gyroscope, the simulation shows that the sensitivity is low and the bandwidth is improved to 900Hz in drive-mode.