BiCMOS integrated microfluidic platform for Bio-MEMS applications

In this paper, a fully BiCMOS integrated microfluidic platform for bio-MEMS applications is demonstrated. The novel integration process flow provides very flexible size of micro-channels in BiCMOS chip and brings the fluid very close to the sensors. The platform is demonstrated with BiCMOS integrated 120 GHz dielectric sensor and the changes of the dielectric constant of different fluids in the channel are successfully detected. The high reproducibility, small size, high throughput and low-cost process make the presented BiCMOS integrated microfluidic channel technology as a key platform for bio-MEMS and THz-sensing applications.