Research on the Verification Method of the Agilent B1505A Semiconductor Device Analyzer

Verification schemes for parameters of semiconductor analyzers, including high voltage and low current, are proposed. As a typical model of the new-generation high-performance semi-conductor analyzer, setup structure and working principals of B1505A is studied. Software for auto verification is coded based on B1505A. Uncertainty analysis confirms the authenticity of results from B1505A. Our work provides an approach for verifying high-performance semiconductor analyzers.