Optical and Glow Diagnostics of 13.56-MHz RF Plasma-PVDF Membrane Surface Interactions

The glow characteristics and optical emission features of 13.56-MHz radio frequency (RF) argon plasmapoly(vinylidene fluoride) membrane surface interactions were studied. The glow of RF plasma surface modification was characterized by optical photography and optical emission spectroscopy. The glow differences were attributed to the nature of the luminous gas phase in respect to chemically reactive species.