Integrated VCSEL-Microlens Scanner With Large Scan Range

We present an integrated beam steering system with a microlens scanner and a vertical cavity surface-emitting laser (VCSEL) source. The scanner and the VCSEL are assembled with an alignment sphere process and with an accuracy of 121 ± 7μm defined by precision microspheres. The microlens scanner employs an electrostatic comb-drive actuator with prebent springs to extend the maximum displacement to 83 μm; 60% larger than that with standard folded springs. This translates to an angular scan range of ±9.6° with the double sided comb-drive scanner. The mechanical resonance with lens is measured to be 236 Hz.