Mechanical Property Measurement of Carbon Infiltrated Carbon Nanotube Structures for Compliant Micromechanisms

Carbon nanotubes (CNTs) can be grown in dense lithographically patterned forests to form framework structures that can be filled in via chemical vapor deposition to form solid structures. These solid structures can then be used in microelectromechanical systems (MEMS) applications. Initial testing with these structures suggests that when these frameworks are filled with carbon, the resulting material exhibits favorable properties for use in compliant MEMS. To better understand this material's properties, we conducted tests to measure its Young's modulus, failure stress, and stress relaxation in the direction perpendicular to the CNT growth, as well as the modulus and stress in the direction parallel to the CNTs. To determine the properties in the transverse direction, we applied vertical loads to the tips of simple cantilever beam samples, and recorded the force and deflection until failure. The results showed failure strain up to 2.48%. Cantilever samples prepared from the same pattern were also used to measure the stress relaxation of the material. The first test for each sample showed an average force relaxation of 3.72%, while successive tests only produced 1.23% after 24 h. To determine the properties in the direction parallel to the CNTs, we prepared simple rectangular beams and subjected them to 3-point bending tests. The average strain calculated in the parallel direction was 8.17%.