Al(1−x)Sc(x)N thin films as promising non-ferroelectric materials for energy harvesting

We report on microstructure evolution and enhancement of longitudinal and transverse piezoelectric responses of AlN thin film with partial substitution of Al
³⁺
ions by Sc
³⁺
ions. Piezoelectric AlScN alloys are very promising for energy harvesting and sensor applications. AlScN 83/87 alloys exhibit a figure of merit that allows for a 60% efficiency increase as compared to pure AlN.