Single image concept for photoluminescence based emitter saturation current imaging using direct calibration by the QSS-μPCD method

A photoluminescence imaging based technique is introduced which enables the measurement of an emitter saturation current image of a wafer with only a single PL image over an extended range of material parameters. The QSS-μPCD technique is used for recording an independent reference value for a direct J
_0e
calibration. It is shown that for accurate results in an extended J
_0e
and bulk lifetime range, an estimation of bulk lifetime is very useful. It is shown that from the QSS-μPCD Basore-Hansen plot this bulk lifetime value can be reliably estimated. Calculated lifetime related corrections are compared to experimental results showing good agreement. As a potential industrial in-line application, results from a 1D camera based PL setup are presented.