Sliding-mode (SM) and Fuzzy-Sliding-Mode (FSM) controllers for high-precisely linear piezoelectric ceramic motor (LPCM)

In nanotechnologies, usages of piezoelectric actuators are widely used. Since the properties of piezo-materials itself are dependent on Curie temperature and they have a reversible effect, a precise positioning using linear piezoelectric ceramic motor (LPCM) is a subject to achieve in this work. A proposed controller mode by combining sliding mode (SM) and fuzzy inference system, so called Fuzzy-Sliding Mode (FSM) controller, is hereafter introduced. In this controller scheme, a sliding part obtains to counter disturbances, while the fuzzy eliminates uncertainties. The results show Excellencies in this work that emphasizes performance improvement of minimizing errors with steady-state errors. The circular motion is then conducted to verify the controller's performance. The controller (FSM) presented in this paper possessed excellent tracking speed (adaptive) and robustness properties.